Chemical Vapor Deposition for Nanotechnology
Chemical vapor deposition (CVD) techniques have played a major role in the development of modern technology, and the rise of nanotechnology has further increased their importance, thanks to techniques such as atomic layer deposition (ALD) and vapor liquid solid growth, which are able to control the...
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| Formato: | Libro |
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IntechOpen
2011
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| Acceso en línea: | Ver este registro en EBSCOhost |
| fields | @attributes: recordID: 1 pdfLink: plink: https://search.ebscohost.com/login.aspx?direct=true&db=nlebk&AN=4007478&site=ehost-live header: @attributes: shortDbName: nlebk uiTerm: 4007478 longDbName: eBook Collection (EBSCOhost) uiTag: AN controlInfo: bkinfo: btl: Chemical Vapor Deposition for Nanotechnology aug: au: Pietro Mandracci isbn: 9781789849608 9781838817329 imageinfo: pubinfo: dt: @attributes: year: 2011 month: 01 day: 01 dtAvail: @attributes: year: 2024 month: 10 day: 04 pub: IntechOpen pubContract: Intech Open place: London, United Kingdom price: 0.01 limitsGroup: maxCheckoutDays: 1500 pda: N printPagesOffline: 100 printPagesOnline: 100 previewPages: 10000 prePubGroup: dewey: @attributes: class: 671.735 item: 671 .735 lc: @attributes: class: TS695 item: TS 695 artinfo: ui: 4007478 1454076406 formats: fmt: @attributes: type: EB doid: NL$4007478$PDF caption: PDF download: Y tig: atl: Chemical Vapor Deposition for Nanotechnology ptl: Chemical Vapor Deposition for Nanotechnology aug: au: Pietro Mandracci su: Nanotechnology Chemical vapor deposition sug: subj: TECHNOLOGY & ENGINEERING / Materials Science / General Nanotechnology Chemical vapor deposition ab: Chemical vapor deposition (CVD) techniques have played a major role in the development of modern technology, and the rise of nanotechnology has further increased their importance, thanks to techniques such as atomic layer deposition (ALD) and vapor liquid solid growth, which are able to control the growth process at the nanoscale. This book aims to contribute to the knowledge of recent developments in CVD technology and its applications. To this aim, important process innovations, such as spatial ALD, direct liquid injection CVD, and electron cyclotron resonance CVD, are presented. Moreover, some of the most recent applications of CVD techniques for the growth of nanomaterials, including graphene, nanofibers, and diamond-like carbon, are described in the book. pubtype: eBook doctype: Book ougenre: Book language: English copyright: @attributes: flag: N copyrightText: holdings: @attributes: islocal: N |
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