Identifying the Hazard Characteristics of Powder Byproducts Generated from Semiconductor Fabrication Processes.
Semiconductor manufacturing processes generate powder particles as byproducts which potentially could affect workers’ health. The chemical composition, size, shape, and crystal structure of these powder particles were investigated by scanning electron microscopy equipped with an energy dispersive sp...
| Publicado en: | Journal of Occupational & Environmental Hygiene Vol. 12; no. 2; pp. 114 - 123 |
|---|---|
| Autores principales: | , , |
| Formato: | pictorial research tables/charts Journal Article |
| Publicado: |
Taylor & Francis Ltd
Feb2015
|
| Acceso en línea: | Ver este registro en EBSCOhost |