Exposure Characteristics of Nanoparticles as Process By-products for the Semiconductor Manufacturing Industry.
This study aims to elucidate the exposure properties of nanoparticles (NPs; <100 nm in diameter) in semiconductor manufacturing processes. The measurements of airborne NPs were mainly performed around process equipment during fabrication processes and during maintenance. The number concentrations of...
| Publicado en: | Journal of Occupational & Environmental Hygiene Vol. 12; no. 8; pp. 153 - 161 |
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| Autores principales: | , , , , |
| Formato: | case study equations & formulas pictorial tables/charts Journal Article |
| Publicado: |
Taylor & Francis Ltd
Aug2015
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| Acceso en línea: | Ver este registro en EBSCOhost |
| fields | @attributes: recordID: 1 pdfLink: plink: https://search.ebscohost.com/login.aspx?direct=true&db=ccm&AN=108328871&site=ehost-live header: @attributes: shortDbName: ccm uiTerm: 108328871 longDbName: CINAHL Complete uiTag: AN controlInfo: bkinfo: dissinfo: jinfo: jid: 15459624 V1L jtl: Journal of Occupational & Environmental Hygiene issn: 15459624 maglogo: Y pubinfo: dt: Aug2015 vid: 12 iid: 8 pid: 377 pub: Taylor & Francis Ltd place: Philadelphia, Pennsylvania artinfo: ui: 108328871 108328871 108328871 10.1080/15459624.2015.1009983 108328871 ppf: 153 ppct: 8 formats: fmt: – @attributes: type: T – @attributes: type: P tig: atl: Exposure Characteristics of Nanoparticles as Process By-products for the Semiconductor Manufacturing Industry. aug: au: Choi, Kwang-Min Kim, Jin-Ho Park, Ju-Hyun Kim, Kwan-Sick Bae, Gwi-Nam affil: Reported by sug: subj: Nanoparticles Electronics Occupational Exposure Particle Size Microscopy, Electron, Scanning Spectrum Analysis Silicon Titanium Oxides ab: This study aims to elucidate the exposure properties of nanoparticles (NPs; <100 nm in diameter) in semiconductor manufacturing processes. The measurements of airborne NPs were mainly performed around process equipment during fabrication processes and during maintenance. The number concentrations of NPs were measured using a water-based condensation particle counter having a size range of 10–3,000 nm. The chemical composition, size, and shape of NPs were determined by scanning electron microscopy and transmission electron microscopy techniques equipped with energy dispersive spectroscopy. The resulting concentrations of NPs ranged from 0.00–11.47 particles/cm3. The concentration of NPs measured during maintenance showed a tendency to increase, albeit incrementally, compared to that measured during normal conditions (under typical process conditions without maintenance). However, the increment was small. When comparing the mean number concentration and standard deviation (n± σ) of NPs, the chemical mechanical polishing (CMP) process was the highest (3.45 ± 3.65 particles/cm3), and the dry etch (ETCH) process was the lowest (0.11 ± 0.22 particles/cm3). The major NPs observed were silica (SiO2) and titania (TiO2) particles, which were mainly spherical agglomerates ranging in size from 25–280 nm. Sampling of semiconductor processes in CMP, chemical vapor deposition, and ETCH reveled NPs were <100 nm in those areas. On the other hand, particle size exceeded 100 nm in diffusion, metallization, ion implantation, and wet cleaning/etching process. The results show that the SiO2and TiO2are the major NPs present in semiconductor cleanroom environments. pubtype: Academic Journal doctype: case study equations & formulas pictorial tables/charts Journal Article ougenre: Article language: English refInfo: holdings: @attributes: islocal: N |
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