Exposure Characteristics of Nanoparticles as Process By-products for the Semiconductor Manufacturing Industry.
This study aims to elucidate the exposure properties of nanoparticles (NPs; <100 nm in diameter) in semiconductor manufacturing processes. The measurements of airborne NPs were mainly performed around process equipment during fabrication processes and during maintenance. The number concentrations of...
| Publicado en: | Journal of Occupational & Environmental Hygiene Vol. 12; no. 8; pp. 153 - 161 |
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| Autores principales: | , , , , |
| Formato: | case study equations & formulas pictorial tables/charts Journal Article |
| Publicado: |
Taylor & Francis Ltd
Aug2015
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| Acceso en línea: | Ver este registro en EBSCOhost |