Investigation of the effect of Si content on the structural, mechanical, and tribological properties of TiAlN/AlSi protective multilayers.

Titanium aluminum nitride and aluminum silicon alloys (TiAlN/AlSi) or for simplicity (TAN/AS) bilayer system were deposited on glass and piston aluminum substrates by following three steps. First, AlSi films realized by thermal evaporation with different Si content (7, 10, 13, 22) %. Then, TiAl film...

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Bibliographic Details

Published in:	Zeitschrift für Naturforschung Section A: A Journal of Physical Sciences Vol. 80; no. 3; pp. 247 - 259
Main Authors:	Lekoui, Fouaz, Amrani, Rachid, Henni, Laid, Filali, Walid, Garoudja, Elyes, Ouchabane, Mohammed, Oussalah, Slimane, Hassani, Salim
Format:	Article
Published:	De Gruyter Mar2025
Subjects:	Silicon alloys DC sputtering Aluminum nitride Titanium nitride Atomic force microscopy
Online Access:	View this record in EBSCOhost