Light Stamping Lithography: Microcontact Printing without Inks.

We report a new patterning method, called light-stamping lithography (LSL), that uses UV-induced adhesion of poly(dimethylsiloxane) (PDMS). LSL is based on the direct transfer of the contact surface of the PDMS stamp to a substrate via a UV (254 nm)-induced surface bonding between the stamp and the...

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Detalles Bibliográficos
Publicado en:	Journal of the American Chemical Society Vol. 128; no. 3; pp. 858 - 866
Autores principales:	Park, Kyung S., Seo, Eun K., Do, Young R., Kim, Kwan, Sung, Myung M.
Formato:	Artículo
Publicado:	American Chemical Society 1/25/2006
Materias:	Lithography Thin films Ultraviolet radiation Computer printers Surface chemistry Biochemistry
Acceso en línea:	Ver este registro en EBSCOhost

Descripción
Sumario:	We report a new patterning method, called light-stamping lithography (LSL), that uses UV-induced adhesion of poly(dimethylsiloxane) (PDMS). LSL is based on the direct transfer of the contact surface of the PDMS stamp to a substrate via a UV (254 nm)-induced surface bonding between the stamp and the substrate. This procedure can be adopted in automated printing machines that generate patterns with a wide range of feature sizes on diverse substrates. To demonstrate its usefulness, the LSL method was applied to prepare several PDMS patterns on a variety of substrates. The PDMS patterns were then used as templates for selective deposition of TiO thin film using atomic layer deposition as well as resists for selective wet etching.