Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy.
Operando surface-enhanced Raman spectroscopy (SERS) was used to successfully identify hitherto unknown dimeric methylalumina surface species during atomic layer deposition (ALD) on a silver surface. Vibrational modes associated with the bridging moieties of both trimethylaluminum (TMA) and dimethyla...
| Publicado en: | Journal of the American Chemical Society Vol. 139; no. 6; pp. 2456 - 2464 |
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| Autores principales: | , , , , |
| Formato: | Artículo |
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American Chemical Society
2/15/2017
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| Acceso en línea: | Ver este registro en EBSCOhost |
| fields | @attributes: recordID: 1 pdfLink: plink: https://search.ebscohost.com/login.aspx?direct=true&db=hlh&AN=121320791&site=ehost-live header: @attributes: shortDbName: hlh uiTerm: 121320791 longDbName: Humanities International Complete uiTag: AN controlInfo: bkinfo: jinfo: jid: 00027863 ACS jtl: Journal of the American Chemical Society issn: 00027863 maglogo: N pubinfo: dt: 2/15/2017 vid: 139 iid: 6 pid: 997 pub: American Chemical Society artinfo: ui: 121320791 10.1021/jacs.6b12709 ppf: 2456 ppct: 8 formats: tig: atl: Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy. aug: au: Hackler, Ryan A. McAnally, Michael O. Schatz, George C. Stair, Peter C. Van Duyne, Richard P. affil: Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States Center for Catalysis and Surface Science, Northwestern University, Evanston, Illinois 60208, United States Article su: Aluminum oxide Atomic layer deposition SERS spectroscopy Density functional theory Methylation Catalytic activity sug: subj: Aluminum oxide Atomic layer deposition SERS spectroscopy Density functional theory Methylation Catalytic activity ab: Operando surface-enhanced Raman spectroscopy (SERS) was used to successfully identify hitherto unknown dimeric methylalumina surface species during atomic layer deposition (ALD) on a silver surface. Vibrational modes associated with the bridging moieties of both trimethylaluminum (TMA) and dimethylaluminum chloride (DMACl) surface species were found during ALD. The appropriate monomer vibrational modes were found to be absent as a result of the selective nature of SERS. Density functional theory (DFT) calculations were also performed to locate and identify the expected vibrational modes. An operando localized surface plasmon resonance (LSPR) spectrometer was utilized to account for changes in SER signal as a function of the number of ALD cycles. DMACl surface species were unable to be measured after multiple ALD cycles as a result of a loss in SERS enhancement and shift in LSPR. This work highlights how operando optical spectroscopy by SERS and LSPR scattering are useful for probing the identity and structure of the surface species involved in ALD and, ultimately, catalytic reactions on these support materials. pubtype: Academic Journal doctype: Article src: R language: English refInfo: copyright: @attributes: flag: Y dt: @attributes: year: 2017 holdings: @attributes: islocal: N |
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