Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy.

Operando surface-enhanced Raman spectroscopy (SERS) was used to successfully identify hitherto unknown dimeric methylalumina surface species during atomic layer deposition (ALD) on a silver surface. Vibrational modes associated with the bridging moieties of both trimethylaluminum (TMA) and dimethyla...

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Bibliographic Details

Published in:	Journal of the American Chemical Society Vol. 139; no. 6; pp. 2456 - 2464
Main Authors:	Hackler, Ryan A., McAnally, Michael O., Schatz, George C., Stair, Peter C., Van Duyne, Richard P.
Format:	Article
Published:	American Chemical Society 2/15/2017
Subjects:	Aluminum oxide Atomic layer deposition SERS spectroscopy Density functional theory Methylation Catalytic activity
Online Access:	View this record in EBSCOhost